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Intelligent Systems
Array 3D detection technology
- Features
- Array-based detection technology aids in high-precision inspection by expanding the field of view, assisting the semiconductor, advanced packaging, and μLED industries in enhancing inspection efficiency.
Description
Addressing the limitations of existing nano-level inspection, which is restricted to laboratory sampling due to the narrow field of view of single-lens systems and cannot meet the demands of online inspection bottlenecks. By introducing the concept of parallel arraying into industries requiring high-precision inspection with a large field of view, such as semiconductors, advanced packaging, and μLED industries, it is possible to achieve simultaneous scanning with multiple arrayed fields of view while maintaining high precision comparable to single-lens systems. This enhances inspection efficiency by at least 4-10 times, meeting the process requirements for nano-level online inspection.Dept：Smart Sensing & Systems Technology Center
POC：李政韋
Tel：06-3847498
E-mail：bensonli@itri.org.tw