A Single-Station Multifunctional Inspection System for Precision Component

Features: The common-optical path design of microscopy and interference provides 2D/3D real-time analysis capabilities in the same field of view, and can be applied to two-in-one single-station CD/OL inspection.

Description

The common-optical path design integrates (1) 2D microscope - inspecting size and defects (2) 3D interference - detecting height and roughness, accomplish 2D/3D real-time analysis in the same field of view with 400 μm measurement range and <0.5 nm accuracy. Single-station that combines multiple station into one, can reduces detection time by 50%, solves the problem of repeated transmission and re-alignment of multiple stations, and can reduce equipment costs by 40%. This technology can be applied to field monitoring of advanced packaging of critical dimensions and layer offset.

Dept：Mechanical and Mechatronics Systems Research Laboratories
POC：王浩偉
Tel：03-5912605
E-mail：hwwang@itri.org.tw

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