- Home
- Intelligent Systems
- The Bellows Type System for Plasma Diagnostic Analysis
Intelligent Systems
The Bellows Type System for Plasma Diagnostic Analysis
- Features
- It can effectively solve the problem of equipment space limitations and provide comprehensive domain measurement verification technology, enabling quick verification of plasma characteristics.
Description
It can effectively solve the problem of equipment space limitations and provide comprehensive domain measurement verification technology, enabling quick verification of plasma characteristics. The measured parameters include plasma potential, floating potential, plasma density, electron temperature, and spatial distribution of electron energy distribution.Operating Parameters
- Pressure: 0 to 20 Torr
- Plasma Power: DC, RF, Microwave
- RF compensation & Reference electrode
- Automatic tip cleaning
Dept：Mechanical and Mechatronics Systems Research Laboratories
POC：林冠宇
Tel：03-5918664
E-mail：guanyulin@itri.org.tw