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Compound Semiconductors
AlSc alloy sputtering target
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- AlScN is the top material for B5G/6G RF filters. This project develops Al-Sc alloy targets and these targets enable key technologies for next-generation communication devices to achieve smaller size, higher efficiency, and better reliability.
Description
The B5G/6G era presents unprecedented challenges for RF filters. AlScN emerges as the preferred material for next-generation filters, offering superior longitudinal wave velocity and thermal stability. High-quality AlScN thin films require premium aluminum-scandium alloy targets. This project aims to develop aluminum-scandium alloy targets meeting world-class manufacturing specifications. Through advanced material synthesis, purification, and target manufacturing technologies, it seeks to establish key innovations for next-generation wireless communication devices. These advancements will support miniaturization, enhance efficiency, and improve reliability in future communications equipment, paving the way for B5G/6G technology implementation and driving global communications innovation.Dept：材料與化工研究所
POC：高宥榛
Tel：(O)03-5916861/(M)0937-850239
E-mail：yuchenkao@itri.org.tw