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Intelligent Systems
EUV metrology
- Features
- This EUV spectral responsivity calibration system is the first radiometric calibration system in the EUV region in Taiwan. It allows local foundries to tune the exposure parameters of an EUV exposure machine with more certain knowledge, and thus could simplify the dose calibration processes and save energy consumption.
Description
Due to the rapid development of semiconductor lithography technology, Taiwan has established its first EUV spectral responsivity calibration system. This system includes a radiation measurement evaluation of EUV detectors to provide traceability for EUV standard detectors. This technology can be applied to the quantitative assessment of EUV exposure dose, enabling wafer manufacturers to better understand the actual exposure dose at the wafer processing site in exposure machines. It extends radiation measurement standards from UV to EUV. The newly developed optical radiation standard covers a wavelength range of 10 nm to 20 nm, meeting the EUV measurement requirements of current EUV lithography process inspection equipment in the semiconductor industry.Dept：Center for Measurement Standards
POC：莊宜蓁
Tel：03-5743834
E-mail：ycchuang@itri.org.tw